• 专利标题:   Probe group module for measuring graphene thin film material resistivity, has spring probe that is arranged in probe remaining hole, and sample table that is provided with sample table main portion provided with square sample placing frame.
  • 专利号:   CN114814313-A
  • 发明人:   REN L, CAO J, JIN S
  • 专利权人:   NAT INST METROLOGY CHINA
  • 国际专利分类:   G01N027/04, G01R001/067, G01R001/073, G01R027/02
  • 专利详细信息:   CN114814313-A 29 Jul 2022 G01R-001/067 202267 Chinese
  • 申请详细信息:   CN114814313-A CN10489201 07 May 2022
  • 优先权号:   CN10489201

▎ 摘  要

NOVELTY - The probe group module has a probe device table, a sample table and a spring probe. The probe device table and the sample table are fixedly connected by a bolt. The probe device table comprises a bolt fixing connecting device table upper portion and a device table lower portion. The device table upper portion and the device table lower portion are provided with four probe remaining holes distributed with square top points. The spring probe is arranged in the probe remaining hole. The sample table comprises a sample table main portion (201). The sample table main portion is provided with a square sample placing frame (202). The top portion of the sample placing frame is provided with a round angle probe placing frame (203). The position of the probe placing frame corresponds to the position of the probe remaining hole. USE - Probe group module for measuring graphene thin film material resistivity used in graphene electric detecting device. ADVANTAGE - The probe group module solves the problem that the surface of the graphene thin film material is damaged, and cannot be reused. The surface of the graphene thin film material is tested on different testing principles or different instruments, and the electrical properties of the materials are compared to determine accurate values. The probe group module has simple operation and simple process. The probe device stage is connected with the upper and lower structures of the sample stage to ensure stable connection. DESCRIPTION OF DRAWING(S) - The drawing shows a schematic view of the structure of probe group module. 201Sample table main portion 202Sample placing frame 203Probe placing frame 204Sample table bolt connecting hole 205Sample taking hole