• 专利标题:   Forming method for apparatus comprising perovskite e.g. graphene FET (GFET), involves using same etchant to remove sections of patterned photoresist material and perovskite underneath sections of photoresist material.
  • 专利号:   EP3258514-A1, WO2017216423-A2, WO2017216423-A3, KR2018133509-A, CN109314185-A
  • 发明人:   BESSONOV A
  • 专利权人:   EMBERION OY
  • 国际专利分类:   H01L051/30, H01L051/46, B82Y010/00, B82Y030/00, H01L029/16, H01L029/66, H01L051/00, H01L051/05, H01L051/42
  • 专利详细信息:   EP3258514-A1 20 Dec 2017 H01L-051/46 201802 Pages: 15 English
  • 申请详细信息:   EP3258514-A1 EP174531 15 Jun 2016
  • 优先权号:   EP174531, CN80036517

▎ 摘  要

NOVELTY - The forming method involves providing a substrate (21) comprising one or more electronic structures (23). A layer of perovskite (25) is provided overlaying one or more electronic structures of the substrate. A layer of photoresist material (27) is coated on the layer of perovskite. A mask (29) is aligned with the electronic structures of the substrate to pattern the photoresist material. The same etchant is used to remove sections of the patterned photoresist material and the perovskite underneath the sections of the photoresist material. USE - Forming method for apparatus comprising perovskite (claimed) e.g. GFET. ADVANTAGE - Uses two-dimensional material for enable formation of nanoelectronic devices. Provides barrier layer to protect perovskite and other components from oxygen, moisture or any other contaminants that may degrade apparatus. DESCRIPTION OF DRAWING(S) - The drawing shows the schematic representation of the forming processes of an apparatus comprising perovskite. Substrate (21) Electronic structures (23) Perovskite (25) Photoresist material (27) Mask (29)