• 专利标题:   Method for forming bi-layer graphene transistor device, involves subjecting electric field to bi-layer graphene channel while subjecting strain that reduces interlayer spacing in bi-layer graphene channel to create bandgap.
  • 专利号:   US2012115295-A1, US8450198-B2
  • 发明人:   LIN Y, YAU J
  • 专利权人:   INT BUSINESS MACHINES CORP
  • 国际专利分类:   H01L021/336, H01L021/4763, H01L029/06
  • 专利详细信息:   US2012115295-A1 10 May 2012 H01L-021/336 201233 Pages: 17 English
  • 申请详细信息:   US2012115295-A1 US351402 17 Jan 2012
  • 优先权号:   US612018, US351402

▎ 摘  要

NOVELTY - The bi-layer graphene channel (112) is formed on a bottom gate dielectric layer (110), and the source and drain contact electrodes are formed at ends of bi-layer graphene channel. A top gate dielectric layer (116) is formed over bi-layer graphene channel. The bottom and top gate electrodes (108,118) and bottom gate dielectric layer are configured to subject the bi-layer graphene channel to electric field while subjecting the bi-layer graphene channel to strain that reduces interlayer spacing in bi-layer graphene channel to create a bandgap in bi-layer graphene channel. USE - Method for forming bi-layer graphene transistor device. METALLURGY - The gate electrode is made of gold, palladium or platinum. ADVANTAGE - The combination of the strain and electric field inside the bi-layer graphene channel results in practical bandgap in the graphene channel thus leading to high on/off ratio required for digital switching applications. DESCRIPTION OF DRAWING(S) - The drawing shows a cross-sectional view of the bi-layer graphene transistor device. Bottom gate electrode (108) Bottom gate dielectric layer (110) Bi-layer graphene channel (112) Top gate dielectric layer (116) Top gate electrode (118)