• 专利标题:   Semiconductor device graphene probe mass detecting method, involves determining electrical output signal of semiconductor device according to contact probe output pressure signal of semiconductor device.
  • 专利号:   CN106249121-A, CN106249121-B
  • 发明人:   LIU Y
  • 专利权人:   CHENGDU HUIZHI YUANJING TECHNOLOGY CO, YANTAI TAIXIN ELECTRONICS TECHNOLOGY CO
  • 国际专利分类:   G01R031/26
  • 专利详细信息:   CN106249121-A 21 Dec 2016 G01R-031/26 201706 Pages: 15 Chinese
  • 申请详细信息:   CN106249121-A CN10766147 30 Aug 2016
  • 优先权号:   CN10766147

▎ 摘  要

NOVELTY - The method involves arranging a production line in a semiconductor device. A graphene probe contact pressure probe is established. Contact probe output pressure signal of the semiconductor device is detected. Electrical output signal of the semiconductor device is determined according to the contact probe output pressure signal of the semiconductor device. A pressure detecting unit is arranged with a contact pressure probe vertical drive unit. An electric detection unit is connected with a graphene sensing unit. USE - Semiconductor device graphene probe mass detecting method. DESCRIPTION OF DRAWING(S) - The drawing shows a flow diagram illustrating a semiconductor device graphene probe mass detecting method. '(Drawing includes non-English language text)'