• 专利标题:   Method for fabricating reduced-graphene oxide circuit, involves reducing graphene oxide layer into reduced graphene oxide by laser, and forming hydrophilic layer by applying piranha solution to react with surface of substrate.
  • 专利号:   US9099376-B1, CN105313400-A
  • 发明人:   YUNG K, LIEM H, CHOY H, LIN H, RONG J, CAI H
  • 专利权人:   NANO ADVANCED MATERIALS INST LTD, NANO ADVANCED MATERIALS INST LTD
  • 国际专利分类:   H01L021/02, H01L021/268, H01L021/336, H01L029/16, B32B017/06, B32B033/00, C03C017/34, C04B041/52
  • 专利详细信息:   US9099376-B1 04 Aug 2015 H01L-021/336 201552 Pages: 12 English
  • 申请详细信息:   US9099376-B1 US297644 06 Jun 2014
  • 优先权号:   US297644

▎ 摘  要

NOVELTY - The method involves providing a substrate. A hydrophilic layer is formed on the substrate. A graphene oxide layer is formed on the hydrophilic layer. A portion of the graphene oxide layer is reduced into reduced graphene oxide by a laser to form a pattern of the reduced graphene oxide on the graphene oxide layer (304). The hydrophilic layer is formed by applying piranha solution to react with a surface of the substrate. The graphene oxide solution is spin-coated on the hydrophilic layer (303). The graphene oxide solution is dried on the hydrophilic layer. USE - Method for fabricating a reduced-graphene oxide circuit. ADVANTAGE - The method enables fabricating a reduced-graphene oxide circuit with a quick prototype process, high throughput, environmentally friendly, high yields, high resolution and precision. The method enables realizing high hydrophobicity of graphene in conjunction with surface roughness with a suitable dimension to achieve high optical transparency and conductivity. The method enables repelling water or moisture to attain self-cleaning ability in an easy manner. The method enables increasing conductivity due to reduction of the graphene when spin speed is increased, thus reducing film thickness. DESCRIPTION OF DRAWING(S) - The drawing shows a schematic view illustrating a method for fabricating a reduced-graphene oxide micro-circuit. Step for cleaning glass substrate by piranha solution (301) Step for coating electrodes on cleaned glass substrate (302) Step for spin-coating graphene oxide solution on hydrophilic layer (303) Step for reducing portion of graphene oxide layer into reduced graphene oxide (304)