▎ 摘 要
NOVELTY - The sensor has a dielectric layer (3) whose portion is formed on a substrate (1), where another portion of the dielectric layer is fixed on a gate electrode (2). A source electrode (4) and a drain electrode (5) are arranged on the substrate. A bottom thermal protection film (6) is provided on the dielectric layer. An external temperature sensitive layer (7) is arranged on the bottom thermal protective film, the source electrode and the drain electrode. A portion of a top heat protection film (8) is fixed on the substrate, where another portion of the top heat protection film is fixed on the external temperature sensitive layer. USE - Thermal protection temperature sensor based on graphene or 2d nano material. ADVANTAGE - The sensor can manufacture in batch at low cost, and realizes optimal electrical characteristics of 2d thin film material and ensures laying foundation for designing and manufacturing a micro-sensor of a new structure in high temperature environment. DETAILED DESCRIPTION - An INDEPENDENT CLAIM is included for a method for manufacturing a thermal protection temperature sensor based on graphene or two-dimensional (2d) nano material. DESCRIPTION OF DRAWING(S) - The drawing shows a side perspective view of a thermal protection temperature sensor based on graphene or two-dimensional nano material. Substrate (1) Gate electrode (2) Dielectric layer (3) Source electrode (4) Drain electrode (5) Bottom thermal protection film (6) External temperature sensitive layer (7) Top thermal protective film (8)