▎ 摘　　要

NOVELTY - The method involves preparing a single layer graphene copper plate by using a chemistry gas phase depositing process. A polymethyl methacrylate layer is supported on a graphene layer. A connecting device is arranged on a substrate layer, a sensor array, an electric pad and a lead. The lead is fixed in the substrate layer. The sensor array is provided with two parallel metal electrodes. The single layer graphene copper plate is fixed on a small cutting piece. A vacuum annealing process is carried out by a graphene FET biosensor of the sensing array. USE - Graphene FET biological sensor manufacturing method. ADVANTAGE - The method enables reducing copper corrosion time and manufacturing cost of a large scale biological sensor based on a CVD graphene technology, thus improving cleanness and performance of a graphene surface in an effective manner. DESCRIPTION OF DRAWING(S) - The drawing shows a process flow diagram illustrating a graphene FET biological sensor manufacturing method.