• 专利标题:   Schottky junction UV photoelectric detector has metal electrode layer that is formed on surface of double layered or three layered nitrogen-doped graphene section which is formed on insulating layer.
  • 专利号:   CN106449857-A
  • 发明人:   LUO L
  • 专利权人:   LUO L
  • 国际专利分类:   H01L031/0352, H01L031/108, H01L031/18
  • 专利详细信息:   CN106449857-A 22 Feb 2017 H01L-031/108 201725 Pages: 6 Chinese
  • 申请详细信息:   CN106449857-A CN11056804 25 Nov 2016
  • 优先权号:   CN11056804

▎ 摘  要

NOVELTY - The detector has a titanium dioxide nano-tube array (2) that is provided along a vertical direction on an upper surface of a P-type silicon substrate layer (1). The upper surface of the titanium dioxide nano-tube array is covered with an insulating layer (3). A double layered or three layered nitrogen-doped graphene section (4) is formed on the insulating layer. A metal electrode layer (5) is formed on the surface of the double layered or three layered nitrogen-doped graphene section. The boundary of the metal electrode layer is not beyond the boundary of the insulating layer. USE - Schottky junction UV photoelectric detector. ADVANTAGE - The simple structured schottky junction UV photoelectric detector is manufactured efficiently and easily at low cost. The detecting ability of the environmental-friendly UV photoelectric detector is improved. DETAILED DESCRIPTION - An INDEPENDENT CLAIM is included for a manufacturing method for schottky junction UV photoelectric detector. DESCRIPTION OF DRAWING(S) - The drawing shows a schematic view of the UV photoelectric detector. P-type silicon substrate layer (1) Titanium dioxide nano-tube array (2) Insulating layer (3) Graphene section (4) Metal electrode layer (5)