• 专利标题:   Temperature-regulated chemi-resistive gas sensor for use in e.g. mobile phone, has circuitry for determining electrical sensor layer conductance signal representing varying electrical conductance of sensor layer and applying time windows.
  • 专利号:   US2023087922-A1, CN115839980-A, KR2023042434-A, EP4151992-A1
  • 发明人:   ZOEPFL A, ROTH A M, EMMERT M, MEYER M, KRIVEC M, BREUER W, KRIEBECK M, ROSS A L, JOYPLE A, ROTH M A
  • 专利权人:   INFINEON TECHNOLOGIES AG, INFINEON TECHNOLOGIES AG, INFINEON TECHNOLOGIES AG
  • 国际专利分类:   G01N001/44, G01N027/12, G01N033/00, B81B007/02
  • 专利详细信息:   US2023087922-A1 23 Mar 2023 G01N-027/12 202331 English
  • 申请详细信息:   US2023087922-A1 US930220 07 Sep 2022
  • 优先权号:   EP197838

▎ 摘  要

NOVELTY - The temperature-regulated chemi-resistive gas sensor (100) comprises a microelectromechanical system (MEMS) device with a heater and a sensor surface (110) thermally coupled to the heater. The sensor surface consists of at least one chemically sensitive sensor layer (101,102,103,104) with an active material (111) for adsorbing and desorbing gas molecules (133) of an analyte gas. A first circuitry applies a predetermined time-continuous periodic temperature profile to the heater for periodically heating the sensor surface. A second circuitry determines an electrical sensor layer conductance signal representing the varying electrical conductance of the sensor layer and applies a set of time windows to the sensor layer conductance signal. The active material of the chemically sensitive sensor layer consists of a graphene-based material, modified graphene, a mono-crystalline graphene monolayer, or a two-dimensional material. USE - Temperature-regulated chemi-resistive gas sensor for sensing gas concentrations at a certain current place indoors or outdoors such as room, urban district and vehicle. ADVANTAGE - Provides a temperature-regulated chemi-resistive gas sensor having a higher temporal resolution, which means that more measurement data is obtained in a certain measurement time interval, which leads to much faster and more precise measurement results. DETAILED DESCRIPTION - INDEPENDENT CLAIMS are included for: 1) a method for operating a temperature-regulated chemi-resistive gas sensor; and 2) a computer-readable storage medium. DESCRIPTION OF DRAWING(S) - The drawing shows a schematic representation of the gas sensing principle of the temperature-regulated chemi-resistive gas sensor. 100Temperature-regulated chemi-resistive gas sensor 101,102,103,104Chemically sensitive sensor layer 110Sensor surface 111Active material 133Gas molecules