• 专利标题:   Silicon grade graphene and black phosphorus transistor, has substrate arranged with upper surface of oxidation silicon isolation layer, and source electrode connected with leakage electrode that is arranged with phosphorus layer.
  • 专利号:   CN105428416-A
  • 发明人:   CHEN Y, LI P, WANG G, ZHANG Q
  • 专利权人:   UNIV CHINA ELECTRONIC SCI TECHNOLOGY
  • 国际专利分类:   H01L021/34, H01L021/44, H01L029/423, H01L029/78
  • 专利详细信息:   CN105428416-A 23 Mar 2016 H01L-029/78 201633 Pages: 7 English
  • 申请详细信息:   CN105428416-A CN10821437 24 Nov 2015
  • 优先权号:   CN10821437

▎ 摘  要

NOVELTY - The transistor has a substrate arranged with an upper surface of an oxidation silicon isolation layer that is arranged with an oxidation silicon groove. The oxidation silicon groove is connected with a grade electrode that is connected with a medium grade. The silicon oxidation groove part is arranged with a graphene and black phosphorus layer that is arranged with a source electrode. The source electrode is connected with a leakage electrode that is arranged with the graphite and black phosphorus layer. The grate electrode is made of polycrystalline silicon material. USE - Silicon grade graphene and black phosphorus transistor. ADVANTAGE - The transistor is easy to control, and has wide range of applications, and increases semiconductor silicon processing efficiency, grade medium quality and graphene and black phosphorus film performance. DETAILED DESCRIPTION - An INDEPENDENT CLAIM is also included for a silicon grade graphene and black phosphorus transistor preparation method. DESCRIPTION OF DRAWING(S) - The drawing shows a cross sectional view of a silicon grade graphene and black phosphorus transistor.