▎ 摘　　要

NOVELTY - Multilayer barrier thin film (100) comprises either: a graphene layer (120), a first inorganic barrier layer (130) to heal the defect of the graphene layer positioned on the graphene layer, an organic barrier layer (140) positioned on the first inorganic barrier layer, and a second inorganic barrier layer located on the organic barrier layer; or the graphene layer, a zinc oxide layer to heal the defects of the graphene layer located on the graphene layer, a poly(3,4-ethylenedioxythiophene (PEDOT) layer located on the zinc oxide layer, and an aluminum oxide layer located on the PEDOT layer. USE - Used as multilayer barrier thin film. ADVANTAGE - The multilayer barrier thin film has excellent barrier performance and mechanical flexibility. DETAILED DESCRIPTION - An INDEPENDENT CLAIM is also included for producing multilayer barrier thin film, comprising either: (a1) forming the graphene layer on a metal substrate (110) by chemical vapor deposition process, (b1) forming the first inorganic barrier layer on the graphene layer by atomic layer deposition process, (c1) forming the organic barrier layer on the first inorganic barrier layer by chemical vapor deposition process, and (d1) forming the second inorganic barrier layer on the organic barrier layer; or (a1), (b1), (c1), (d1), (e2) forming an adhesive layer on the second inorganic barrier layer, and (f2) removing the metal substrate. DESCRIPTION OF DRAWING(S) - The drawing shows a cross-sectional view of the multilayer barrier thin film. Multilayer barrier thin film (100) Metal substrate (110) Graphene layer (120) First inorganic barrier layer (130) Organic barrier layer (140)