• 专利标题:   Electronic device e.g. field effect transistor (FET) has graphene that directly contacts area of semiconductor layer, and metal layer on graphene.
  • 专利号:   US2014158989-A1, KR2014075460-A, US9306005-B2, KR1920724-B1
  • 发明人:   BYUN K, PARK S, SEO D, SONG H, LEE J, CHUNG H, HEO J, BYUN K E, PARK S J, SONG H J, LEE J H, CHUNG H J, HEO J S
  • 专利权人:   SAMSUNG ELECTRONICS CO LTD, SAMSUNG ELECTRONICS CO LTD
  • 国际专利分类:   H01L029/16, H01L029/775, H01L021/336, H01L029/78, H01L029/06, H01L029/10, H01L029/45, H01L029/739, H01L029/786
  • 专利详细信息:   US2014158989-A1 12 Jun 2014 H01L-029/16 201441 Pages: 17 English
  • 申请详细信息:   US2014158989-A1 US103079 11 Dec 2013
  • 优先权号:   KR143825

▎ 摘  要

NOVELTY - The electronic device (10) has a semiconductor layer (30) that includes an area (40). The semiconductor layer have a constant doping density in overall or the area includes at least one of a doping density that is less than or equal to 1019 cm3, and a depletion width of less than or equal to 3 nm. A graphene (50) directly contacts the area of the semiconductor layer, and a metal layer (70) on the graphene. The area of the semiconductor layer includes the depletion width of less than or equal to 3 nm. The semiconductor layer is a semiconductor substrate. USE - Electronic device e.g. field effect transistor (FET) (claimed). ADVANTAGE - Since the FET can be miniaturized, the driving voltage due to a decrease in a contact resistance and the size of an electrode area is due to the decrease in the contact resistance are reduced. Since high-density doping or the source area and the drain area is not necessary to lower a schottky energy barrier even though size of device is miniaturized, the occurrence of a short channel effect by which a channel is not properly formed because doping portions of the source area and the drain area meet each other is reduced effectively. DESCRIPTION OF DRAWING(S) - The drawing shows a cross-sectional view of the electronic device. Electronic device (10) Semiconductor layer (30) Area (40) Graphene (50) Metal layer (70)