• 专利标题:   Graphene FET, has metal source electrode and metal drain electrode that are fixed on substrate surface, and top gate electrode arranged between bottom and upper surfaces of graphene channel layer, where channel layer is formed with gap.
  • 专利号:   CN103745994-A
  • 发明人:   WEI X, ZHENG L, DI Z, FANG Z
  • 专利权人:   SEMICONDUCTOR MFG INT SHANGHAI CO LTD
  • 国际专利分类:   H01L021/285, H01L021/336, H01L029/423, H01L029/78
  • 专利详细信息:   CN103745994-A 23 Apr 2014 H01L-029/78 201439 Pages: 9 Chinese
  • 申请详细信息:   CN103745994-A CN10720981 24 Dec 2013
  • 优先权号:   CN10720981

▎ 摘  要

NOVELTY - The FET has a metal source electrode and a metal drain electrode that are fixed on a substrate surface. A gap is formed between the metal source and drain electrodes. A graphene channel layer is formed on a graphene channel layer lap joint and matched with the gap. A top gate electrode is arranged between bottom and upper surfaces of the channel layer. The top gate electrode and a bottom gate electrode are coated with high dielectric constant material that is selected from one of aluminum oxide (Al203), hafnium oxide (HfO2), lanthanum oxide (La2O5) and aluminum nitride (AlN). USE - Graphene FET. ADVANTAGE - The FET obtains the top gate electrode and the bottom gate electrode in a simple manner and realizes atom layer deposition operation so as to determine a lower part of the graphene channel layer. DETAILED DESCRIPTION - An INDEPENDENT CLAIM is also included for a graphene FET manufacturing method. DESCRIPTION OF DRAWING(S) - The drawing shows a flow diagram illustrating a graphene FET manufacturing method.'(Drawing includes non-English language text)'