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  • 专利标题:   Graphene wiring structure comprises multilayered graphene having laminated multiple planar polycrystal graphene sheets, and metal oxyhalide and metal halide which exist in the interlayer of planar polycrystal graphene sheets.
  • 专利号:   JP6181224-B1, JP2017157784-A, US2017256499-A1, US9997611-B2
  • 发明人:   MIYAZAKI H, SAKAI T, KATAGIRI M, YAMAZAKI Y
  • 专利权人:   TOSHIBA KK, TOSHIBA KK, TOSHIBA KK
  • 国际专利分类:   C01B032/194, H01L021/28, H01L021/3205, H01L021/768, H01L023/532, C01B032/15, C01B032/18, C01B032/182, H01L021/02, H01L023/528, H01L023/52, H01L021/4763, H01L029/66, H01L039/12, H01L029/16
  • 专利详细信息:   JP6181224-B1 16 Aug 2017 H01L-021/28 201755 Pages: 15 Japanese
  • 申请详细信息:   JP6181224-B1 JP042270 04 Mar 2016
  • 优先权号:   JP042270

▎ 摘　　要

NOVELTY - A graphene wiring structure comprises multilayered graphene (1) having laminated multiple planar polycrystal graphene sheets (1A-1F), and metal oxyhalide and metal halide which exist in the interlayer of planar polycrystal graphene sheets. USE - A graphene wiring structure. ADVANTAGE - The graphene wiring structure has low resistance and suppresses leakage of interlayer substance. DETAILED DESCRIPTION - An INDEPENDENT CLAIM is included for preparation of graphene wiring structure which involves inserting halogenated metal between layers of multilayered graphene (1) in which planar polycrystal graphene sheets (1A-1F) are laminated and oxidizing multilayered graphene to form metal oxyhalide substance (2) between 1st layers. DESCRIPTION OF DRAWING(S) - The drawing shows a cross-sectional diagram of the graphene wiring structure. Multilayered graphene (1) Planar graphene sheet (1A-1F) Substance between 1st layers (2)