• 专利标题:   Nitrogen dioxide gas detecting sensor, has multi-layer film structure provided with silicon-based substrate, insulating layer, electrode layer and gas sensitive layer, where gas sensitive layer comprises graphene and compound grapheme.
  • 专利号:   CN111307876-A
  • 发明人:   ZHAO H, TU H, WEI F, ZHANG G
  • 专利权人:   GRINM ENG TECHNOLOGY RES INST CO LTD
  • 国际专利分类:   G01N027/12
  • 专利详细信息:   CN111307876-A 19 Jun 2020 G01N-027/12 202057 Pages: 8 Chinese
  • 申请详细信息:   CN111307876-A CN11514190 11 Dec 2018
  • 优先权号:   CN11514190

▎ 摘  要

NOVELTY - The sensor has a multi-layer film structure provided with a silicon-based substrate, an insulating layer, an electrode layer and a gas sensitive layer. The gas sensitive layer comprises graphene and compound grapheme. A single-layer molybdenum disulfide film is formed on a surface of the multi-layer film structure. USE - Nitrogen dioxide gas detecting sensor. ADVANTAGE - The sensor is simple in structure, and can be manufactured at low temperature and low cost. DETAILED DESCRIPTION - An INDEPENDENT CLAIM is included for a nitrogen dioxide gas detecting sensor manufacturing method. DESCRIPTION OF DRAWING(S) - The drawing shows a schematic view of a nitrogen dioxide gas detecting sensor.