• 专利标题:   Producing hexagonal boron nitride thin film useful for photoelectric device, light-emitting and light-receiving device, comprises forming hexagonal boron nitride thin film on graphene oxide layer by supplying e.g. boron-containing precursor.
  • 专利号:   KR2020099634-A
  • 发明人:   KO K B, YOO B, HAN M, TRANVEITCUONG, HONG C
  • 专利权人:   UNIV CHONBUK NAT IND COOP FOUND
  • 国际专利分类:   C23C016/02, C23C016/34, C23C016/455, C30B029/40, H01L031/0304, H01L031/0392, H01L031/18
  • 专利详细信息:   KR2020099634-A 25 Aug 2020 C23C-016/34 202078 Pages: 13
  • 申请详细信息:   KR2020099634-A KR017051 14 Feb 2019
  • 优先权号:   KR017051

▎ 摘  要

NOVELTY - Producing hexagonal boron nitride (h-BN) thin film comprises (a) forming a graphene layer or a graphene oxide layer (20) on a substrate (10); and (b) forming h-BN thin film (30) on the graphene layer or the graphene oxide layer by supplying boron-containing precursor and nitrogen-containing precursor, and heat treating by organometallic chemical vapor deposition (MOCVD) method. USE - The method is useful in producing h-BN thin film for photoelectric device (claimed), light-emitting and light-receiving device. ADVANTAGE - The method produces high-quality h-BN thin film by reducing crystal defects in the h-BN thin film caused by difference in lattice constant from substrate, and has excellent mechanical and chemical stability and energy band gap of 6.5 eV. DETAILED DESCRIPTION - An INDEPENDENT CLAIM is also included for photoelectric device comprising h-BN thin film produced by the above method. DESCRIPTION OF DRAWING(S) - The drawing shows a schematic representation of the h-BN thin film formed on substrate. Substrate (10) Graphene layer or graphene oxide layer (20) Hexagonal boron nitride thin film (30)