▎ 摘　　要

NOVELTY - This utility new type claims a one graphene micro type flow rate sensor, belonging to the MEMS device, used for flow rate measurement pneuma, solving the flow sensor has large power consumption, the substrate exist, a response time length a. This utility new type of graphene micro type flow rate sensor, a substrate is provided with a groove, the groove upper insulating layer, a layer is sputtered with a heating body, two heating end of sputtering with a body. This utility new type of the other one a micro type flow rate sensor, a substrate is provided with a groove, the groove upper heat insulating layer, heat insulating layer upper cover with insulation layer, a insulation layer is sputtered with heating body, two end heating body is sputtered with a metal electrode. This utility new type has small volume, light weight and stable property, it can reduce the valid substrate transfer heat caused by a measurement error, through measuring the difference value of a heating body front and back gas to determine pneuma flow, effectively solves the problem that the existing flow sensor has large power consumption, the substrate exist, a response time length a.