• 专利标题:   Ceramic sintered body useful in electrostatic chuck, comprises aluminum oxide and aluminum nitride and material including graphite and graphene.
  • 专利号:   KR2017141340-A
  • 发明人:   BAIK S W, CHO W S, CHOI K B, KIM B H, KIM J Y
  • 专利权人:   KOREA INST CERAMIC ENG TECHNOLOGY, MAX TECH CO LTD
  • 国际专利分类:   C04B035/10, C04B035/52, C04B035/581, C04B035/632, C04B035/645, H01L021/683
  • 专利详细信息:   KR2017141340-A 26 Dec 2017 C04B-035/645 201804 Pages: 12
  • 申请详细信息:   KR2017141340-A KR074242 15 Jun 2016
  • 优先权号:   KR074242

▎ 摘  要

NOVELTY - Ceramic sintered body comprises aluminum oxide and/or aluminum nitride, and material including graphite and/or graphene in a volume ratio of 1:90-100. USE - The sintered body is useful in electrostatic chuck (claimed). ADVANTAGE - The sintered body has plasma characteristics, mechanical properties, high resistivity, high permittivity, less dielectric loss, compactness and low surface roughness; and suppresses generation of contaminating particles and cracks. DETAILED DESCRIPTION - AN INDEPENT CLAIM is also included for producing ceramic sintered body, comprising (a) preparing starting material by mixing powder of alumina oxide and/or aluminum nitride and graphite and/or graphene, (b) molding the mixed starting material, and (c) forming sintered body by sintering the molded product.