▎ 摘 要
NOVELTY - Ceramic sintered body comprises aluminum oxide and/or aluminum nitride, and material including graphite and/or graphene in a volume ratio of 1:90-100. USE - The sintered body is useful in electrostatic chuck (claimed). ADVANTAGE - The sintered body has plasma characteristics, mechanical properties, high resistivity, high permittivity, less dielectric loss, compactness and low surface roughness; and suppresses generation of contaminating particles and cracks. DETAILED DESCRIPTION - AN INDEPENT CLAIM is also included for producing ceramic sintered body, comprising (a) preparing starting material by mixing powder of alumina oxide and/or aluminum nitride and graphite and/or graphene, (b) molding the mixed starting material, and (c) forming sintered body by sintering the molded product.