• 专利标题:   Optical sensor, has graphene layer provided with main surface to which light is irradiated, and plasmon antenna arranged at main surface, where area of antenna is smaller than area of another antenna at planar view from direction perpendicular to surface.
  • 专利号:   JP2021107786-A
  • 发明人:   MIYATAKE T
  • 专利权人:   FUJITSU LTD
  • 国际专利分类:   G01J001/02, G01J001/04, H01L031/08
  • 专利详细信息:   JP2021107786-A 29 Jul 2021 G01J-001/02 202163 Pages: 13 Japanese
  • 申请详细信息:   JP2021107786-A JP239153 27 Dec 2019
  • 优先权号:   JP239153

▎ 摘  要

NOVELTY - The optical sensor (1) has a graphene layer (13) which comprises a first main surface (13A) to be irradiated with light and a second main surface (13B) set opposite to the first main surface. A first plasmon antenna (11) is arranged on the first main surface. A second plasmon antenna (12) is arranged on the second main surface. The second area of the second plasmon antenna is smaller than the first area of the first plasmon antenna in a plan view from a direction perpendicular to the first main surface. USE - Optical sensor. ADVANTAGE - The optical sensor comprises a graphene layer that is provided with a graphene main surface, and thus improves the sensitivity of the optical sensor. DESCRIPTION OF DRAWING(S) - The drawings show the top and sectional views of a optical sensor. (Drawing includes non-English language text) Optical sensor (1) Plasmon antennas (11,12) Graphene layer (13) Main surfaces (13A,13B) Electrode (33)