• 专利标题:   Graphene-containing structure used for e.g. semiconductor device, comprises silicon carbide semiconductor layer, graphene layer on semiconductor layer, and aluminum nitride layer provided between semiconductor layer and graphene layer.
  • 专利号:   JP2019169544-A, JP6774452-B2
  • 发明人:   WU P T, YOSHIDA M, KIMURA S, MIYAZAKI H, YAMAZAKI Y
  • 专利权人:   TOSHIBA KK
  • 国际专利分类:   C01B021/072, C01B032/186, H01L021/205, H01L021/336, H01L029/267, H01L029/786, H01L051/05, H01L051/30, H01L051/40
  • 专利详细信息:   JP2019169544-A 03 Oct 2019 H01L-029/267 201980 Pages: 10 Japanese
  • 申请详细信息:   JP2019169544-A JP054820 22 Mar 2018
  • 优先权号:   JP054820

▎ 摘  要

NOVELTY - Graphene-containing structure (100) comprises a silicon carbide semiconductor layer (4), a graphene layer (3) on the silicon carbide semiconductor layer, and a first aluminum nitride layer (1) provided between the silicon carbide semiconductor layer and the graphene layer. USE - The graphene-containing structure is useful for the semiconductor device such as field effect transistor and for detection device such as a gas sensor and a light detection device. ADVANTAGE - The graphene-containing structure increases the area and mass production of graphene, improves the carrier mobility of graphene, and provides a semiconductor device with high carrier mobility. DETAILED DESCRIPTION - INDEPENDENT CLAIMS are included for the following: (1) a semiconductor device; and (2) a method for producing the graphene-containing structure. DESCRIPTION OF DRAWING(S) - The drawing shows a schematic perspective view of the graphene-containing structure. First aluminum nitride layer (1) Graphene layer (3) Silicon carbide semiconductor layer (4) Graphene-containing structure (100)