• 专利标题:   Schottky diode, has heavily doped N-type silicon carbide substrate whose rear part is provided with ohm contact electrode, where Schottky contact electrode is fixed on graphene layer for forming anode electrode.
  • 专利号:   CN109004018-A
  • 发明人:   RAN J, WEI T, WANG J
  • 专利权人:   INST SEMICONDUCTORS CHINESE ACAD SCI
  • 国际专利分类:   H01L029/06, H01L021/336, H01L029/872
  • 专利详细信息:   CN109004018-A 14 Dec 2018 H01L-029/06 201909 Pages: 6 Chinese
  • 申请详细信息:   CN109004018-A CN10810551 23 Jul 2018
  • 优先权号:   CN10810551

▎ 摘  要

NOVELTY - The diode has a lightly doped N-type silicon carbide layer coated on a heavily doped N-type silicon carbide substrate. A graphene layer is coated on a non-doped silicon carbide layer. A rear part of the heavily doped N-type silicon carbide substrate is provided with an ohm contact electrode. A Schottky contact electrode is fixed on the graphene layer for forming an anode electrode. The non-doped silicon carbide layer is crystal of hexagonal silicon carbide monocrystalline wafer, where doping concentration of the heavily doped N-type silicon carbide substrate is greater than 1018 cm-3. USE - Schottky diode. ADVANTAGE - The diode can reduce Schottky diode forward threshold voltage and reverse leakage current. DETAILED DESCRIPTION - An INDEPENDENT CLAIM is also included for a method for manufacturing a Schottky diode. DESCRIPTION OF DRAWING(S) - The drawing shows a front view of a Schottky diode.