▎ 摘　　要

NOVELTY - Preparing nano-cerium oxide-graphene composite particles involve dispersing cerium oxide in semiconductor ultrapure water, and drying the dispersion solution to obtain cerium oxide powder. The obtained cerium oxide powder is dispersed in a hydrogen peroxide solution for 80-120 minutes, and added a dispersant for 60-80 minutes to obtain a surface-treated cerium oxide suspension. The graphene is dispersed in an organic solvent for 100-120 minutes to obtain a graphene suspension. The obtained graphene suspension is added to the cerium oxide suspension with organic modification reagent for 80-120 min, and then dried to obtain a crude cerium oxide-graphene composite particle. The obtained crude cerium oxide-graphene composite particles are calcined to obtain the nanometer cerium oxide-graphene composite particles. USE - Method for preparing nano-cerium oxide-graphene composite particles used in chemical mechanical polishing and polishing liquid dispersion in semiconductor field. ADVANTAGE - The method prepares the nano-cerium oxide-graphene composite particles in a simple, cost-effective and eco-friendly manner with a particle size of 10-5000 nm, narrow particle size distribution, and easy dispersion.