▎ 摘　　要

NOVELTY - The method involves forming a graphene film layer on a surface of a chamber. X-ray analysis equipment is provided with the chamber. A detecting apparatus is connected with a collimated beam X-ray irradiation equipment. Graphene is placed in X-ray path. Humidity condition and temperature of the chamber are detected by the detecting apparatus. X-ray is penetrated through the Graphene. A part of a substrate is removed during etching process. A peak center of a standard graphene crystal plane is provided with a Miller index. USE - X-ray penetration analysis method. ADVANTAGE - The method enables increasing reliability and product competitiveness of finished product. DESCRIPTION OF DRAWING(S) - The drawing shows a schematic view illustrating an x-ray penetration analysis method. '(Drawing includes non-English language text)'