• 专利标题:   High-temperature continuous graphene growing device has gas inlet mechanism that is arranged for providing graphene growth reaction gas into reaction chamber.
  • 专利号:   CN103305806-A, CN103305806-B
  • 发明人:   DU C, HUANG D, LI Z, SHI H, WEI D, ZHANG Y
  • 专利权人:   CHONGQING INST GREEN INTELLIGENT TECHN, CHONGQING MOXI TECHNOLOGY CO LTD
  • 国际专利分类:   C01B031/04, C23C016/26, C23C016/54
  • 专利详细信息:   CN103305806-A 18 Sep 2013 C23C-016/26 201381 Pages: 7 Chinese
  • 申请详细信息:   CN103305806-A CN10270021 28 Jun 2013
  • 优先权号:   CN10270021

▎ 摘  要

NOVELTY - The device has a sealing cabinet (2) that is set in a vacuum chamber (1). A heater roller wheel (4) is set in a substrate channel winding base. A heater (5) is installed in the vacuum chamber. A reaction chamber (6) is provided with connected air inlet mechanism. A vacuum pump (8) is set in a reaction chamber for providing a vacuum reaction condition. A gas inlet mechanism is arranged for providing graphene growth reaction gas into the reaction chamber. USE - High-temperature continuous graphene growing device. ADVANTAGE - The device provides stable growth of graphene, and balances chemical vapor deposition in large area to realize large-scale preparation of the graphene. DESCRIPTION OF DRAWING(S) - The drawing shows a schematic view of the graphene growing device. Vacuum chamber (1) Sealing cabinet (2) Heater roller wheel (4) Heater (5) Reaction chamber (6) Vacuum pump (8)