▎ 摘 要
NOVELTY - A graphene-carbon nanotube structure has a substrate (1), a base (2) formed on top of the substrate, vertical graphene (4) which grows from the base, and stands in a vertical direction with respect to the surface of substrate, and is superimposed densely, and carbon nanotube which grows from the base and is integrally formed from the lower end of vertical graphene in upper end. USE - Graphene-carbon nanotube structure is used for refinement of wiring in semiconductor device. ADVANTAGE - The graphene-carbon nanotube structure has excellent reliability, and high density. DETAILED DESCRIPTION - An INDEPENDENT CLAIM is included for manufacture of graphene-carbon nanotube structure, which involves forming base on top of substrate, growing vertical graphene with respect to base surface, and growing carbon nanotube connected successively in the lower end and upper end of vertical graphene. DESCRIPTION OF DRAWING(S) - The drawing shows the schematic sectional view explaining the manufacturing method of graphene structure. Substrate (1) Base (2) Layers (2a,2b) Horizontal graphene (3) Vertical graphene (4)