• 专利标题:   Monitoring of surface of graphene for polymer-residue inspection, involves attaching support film to graphene film formed on substrate, and dyeing support thin film by ionization of coloring agent which exhibits more than one color.
  • 专利号:   KR1366114-B1
  • 发明人:   KIM H K, KIM Y N, YANG W S
  • 专利权人:   KOREA ELECTRONICS TECHNOLOGY INST
  • 国际专利分类:   G01N021/78, G01N031/22, G01N033/00
  • 专利详细信息:   KR1366114-B1 24 Feb 2014 G01N-031/22 201422 Pages: 14
  • 申请详细信息:   KR1366114-B1 KR099750 10 Sep 2012
  • 优先权号:   KR099750

▎ 摘  要

NOVELTY - Monitoring of graphene surface, involves attaching a support thin film to a graphene thin film formed on the upper surface of a substrate, and dyeing the support thin film by ionization of coloring agent which exhibits more than one color. USE - Monitoring of surface of graphene for polymer-residue inspection in electronic device. ADVANTAGE - The method enables easy confirmation of polymer residue.