• 专利标题:   Processing of silicon chip surface for graphene growth, involves immersing clean silicon wafer in hydrofluoric acid solution, washing with water, drying, immersing in phenol derivative solution, rinsing, and drying.
  • 专利号:   CN110335805-A
  • 发明人:   YU X, HUANG K, CONG J, YANG D
  • 专利权人:   UNIV ZHEJIANG
  • 国际专利分类:   H01L021/02
  • 专利详细信息:   CN110335805-A 15 Oct 2019 H01L-021/02 201990 Pages: 9 Chinese
  • 申请详细信息:   CN110335805-A CN10482131 04 Jun 2019
  • 优先权号:   CN10482131

▎ 摘  要

NOVELTY - Processing of silicon chip surface for in-situ graphene growth, involves immersing a clean silicon wafer in hydrofluoric acid aqueous solution, taking out the silicon wafer, washing with deionized water, drying, immersing in 0.05-0.2 M alcohol solution of phenol derivative, taking out the silicon wafer, rinsing with anhydrous alcohol, and drying. USE - Processing of silicon chip surface for in-situ graphene growth. ADVANTAGE - The method reduces the contact angle of the surface of silicon wafer, provides nucleation sites for growth of graphene, enables preparation of large-area graphene, and is simple.