• 专利标题:   Method for manufacturing large-area semiconductor device, involves forming semiconductor layer by coating second dispersion in which two dimensional material are dispersed on insulating film.
  • 专利号:   KR2023076964-A
  • 发明人:   HOUN K J, KIM J H
  • 专利权人:   UNIV SUNGKYUNKWAN RES BUSINESS FOUND
  • 国际专利分类:   H01L021/02, H01L029/26, H01L029/786
  • 专利详细信息:   KR2023076964-A 01 Jun 2023 H01L-029/786 202349 Pages: 15
  • 申请详细信息:   KR2023076964-A KR162737 23 Nov 2021
  • 优先权号:   KR162737

▎ 摘  要

NOVELTY - The method involves forming a first coating layer (200) by coating a first dispersion in which a two-dimensional material (A) is dispersed on a substrate (100). The coating layer is annealed to form an insulating layer (300). A semiconductor layer is formed by coating the second dispersion, in which the two dimensional material (B) are dispersed on the insulating film. An electrode is patterned on the semiconductor film. A graphene layer (500) and a metal electrode are formed on the graphene layer. The graphene-metal layer is transferred onto the second coating layer. USE - Method for manufacturing large-area semiconductor device (claimed). ADVANTAGE - The method enables to manufacture large-area semiconductor device in a simple and cost-effective manner. DETAILED DESCRIPTION - An INDEPENDENT CLAIM is included for a large-area semiconductor device. DESCRIPTION OF DRAWING(S) - The drawing shows the block diagram of the method for manufacturing large-area semiconductor device. (Drawing includes non-English language text) 100Substrate 200First coating layer 300Insulating layer 400Second coating layer 500Graphene layer