• 专利标题:   Device for growing volume of continuous graphene thin film, has first vacuum chamber whose side is provided with radio frequency plasma generator, heating furnace and liquid nitrogen cold trap.
  • 专利号:   CN105752968-A
  • 发明人:   KONG L, WU K, WANG Z
  • 专利权人:   ANHUI BEQ EQUIP TECHNOLOGY CO LTD
  • 国际专利分类:   C01B031/04
  • 专利详细信息:   CN105752968-A 13 Jul 2016 C01B-031/04 201662 Pages: 5 Chinese
  • 申请详细信息:   CN105752968-A CN10076741 31 Jan 2016
  • 优先权号:   CN10076741

▎ 摘  要

NOVELTY - The device has a machine structure (1) that is provided with a working table (2). The two ends of the working table are provided with a first vacuum chamber (3) and a second vacuum chamber (4). The first and second vacuum chambers are provided with a rolling drum (7). The rolling drum is provided with a rotary motor (8). A vacuum tube (9) is connected between the first vacuum chamber and the second vacuum chamber. The side of the first vacuum chamber is provided with a radio frequency plasma generator (10), a heating furnace (11) and a liquid nitrogen cold trap (12). USE - Device for growing volume of continuous graphene thin film. ADVANTAGE - The high quality graphene device is achieved. The fast and continuous process is achieved. The high quality graphene is achieved for large-scale growth. DESCRIPTION OF DRAWING(S) - The drawing shows a schematic view of the device for growing volume of continuous graphene thin film. Machine structure (1) Working table (2) Vacuum chamber (3,4) Rolling drum (7) Rotary motor (8) Vacuum tube (9) Radio frequency plasma generator (10) Heating furnace (11) Liquid nitrogen cold trap (12)