• 专利标题:   Production method for producing graphene on copper substrate, involves continuously monitoring temperature of copper sheets and heating copper sheets to specified temperature for predetermined time using electromagnetic induction heater.
  • 专利号:   WO2018014143-A1, KR2019032401-A, EP3489194-A1, US2019233942-A1
  • 发明人:   HABERLE TAPIA P, ORELLANA GOMEZ C, HABERLE T P, ORELLANA G C, HAEBERLE TAPIA P, HAEBERLE T P
  • 专利权人:   UNIV TECNICA FEDERICO SANTA MARIA, UNIV TECNICA FEDERICO SANTA MARIA
  • 国际专利分类:   B82Y030/00, B82Y040/00, C01B031/00, C01B031/04, C23C016/26, C23C016/44, C23C016/46, C23C016/54, H01L021/00, H01L021/02, H01L021/285, C23C016/02, C01B032/00
  • 专利详细信息:   WO2018014143-A1 25 Jan 2018 C01B-031/00 201812 Pages: 28 Spanish
  • 申请详细信息:   WO2018014143-A1 WOCL050032 18 Jul 2017
  • 优先权号:   CL001858, WOCL050032, US16318193

▎ 摘  要

NOVELTY - The production method involves arranging two copper sheets (40) in a parallel manner and separated by a ceramic material (30) and placing the copper sheets inside a cylindrical glass chamber (10). The copper sheets are heated to a predetermined temperature using an electromagnetic induction heater (20). A mixture of methane and argon flow is supplied to an upper face (18) of the chamber. The temperature of the copper sheets is continuously monitored and heated to 1000 degrees C for a predetermined time using the heater, and is cooled to room temperature under the same methane and argon flow. USE - Production method for producing graphene on copper substrate. ADVANTAGE - The production method carries out chemical vapor deposition process, in which a reaction gas is made to flow in the chamber to a relatively low pressure in comparison with the conventional processes and the temperature in the reaction chamber is diminished in relatively slow form. DETAILED DESCRIPTION - An INDEPENDENT CLAIM is also included for a system for producing graphene on a copper substrate by modified chemical vapor deposition. DESCRIPTION OF DRAWING(S) - The drawing shows the schematic diagram of the system for producing graphene on a copper substrate. Glass chamber (10) Upper face (18) Electromagnetic induction heater (20) Ceramic material (30) Copper sheets (40)