▎ 摘　　要

NOVELTY - Manufacture of zinc titanium oxide composite membrane involves forming a titanium oxide film on a substrate using a sub-cycle (A), forming a zinc oxide film on the titanium oxide film using a sub-cycle (B), repeating the deposition cycle including the sub-cycles (A, B) for several times to form a titanium oxide/zinc oxide layered structure and heat-treating the titanium oxide layer/zinc oxide layer structure. USE - Manufacture of zinc titanium oxide composite membrane used for manufacturing copper indium gallium selenide (CGS)-thin film solar panel (all claimed). ADVANTAGE - The method enables to manufacture zinc-titanium oxide composite membrane in simple manner. DETAILED DESCRIPTION - Manufacture of zinc titanium oxide (ZnxTiyO) composite membrane involves forming a titanium oxide film on a substrate using a sub-cycle (A), forming a zinc oxide film on the titanium oxide film using a sub-cycle (B), repeating the deposition cycle including the sub-cycles (A, B) for several times to form a titanium oxide/zinc oxide layered structure and heat-treating the titanium oxide layer/zinc oxide layer structure. An INDEPENDENT CLAIM is included for manufacture of copper indium gallium selenide (CGS)-thin film solar panel, which involves forming an electrode (a) on a substrate, forming a light absorption layer, forming a buffer layer on the light absorption layer, forming a window layer containing zinc titanium oxide composite membrane on the buffer layer and forming an electrode (b) on the window layer.