• 专利标题:   Releasing graphene layer from substrate, comprises forming graphene layer on surface of first substrate, forming metal layer on a surface of graphene layer and applying a pulling force on the metal layer to detach graphene layer.
  • 专利号:   US2010323164-A1, EP2267761-A2, JP2011006265-A, CN101927998-A, EP2267761-A3, JP5097172-B2, US8524366-B2, CN101927998-B, EP2267761-B1
  • 发明人:   OGIHARA M, SAGIMORI T, SAKUTA M, HASHIMOTO A, TANAKA S, OGIWARA M, MITSUHIKO O, TOMOHIKO S, MASAAKI S, AKIHIRO H
  • 专利权人:   OKI DATA CORP, OKI DATA CORP, OKI DATA CORP, OKI DIGITAL IMAGING KK, OKI DATA KK, OKI DATA KK
  • 国际专利分类:   B32B003/26, B32B038/10, C01B031/04, H01L021/02, H01L021/20, H01L029/786, H01L051/05, H01L051/30, H01L051/40, B32B009/00
  • 专利详细信息:   US2010323164-A1 23 Dec 2010 B32B-003/26 201103 Pages: 20 English
  • 申请详细信息:   US2010323164-A1 US801720 22 Jun 2010
  • 优先权号:   JP148308

▎ 摘  要

NOVELTY - Releasing a graphene layer from a substrate, comprises (a) forming a graphene layer on a surface of a first substrate, optionally, patterning the graphene layer, (b) forming a metal layer on a surface of the graphene layer and (c) applying a pulling force on the metal layer to detach the graphene layer from the first substrate. USE - The methods are useful for releasing a graphene layer from a substrate, and manufacturing a graphene wafer and a graphene device (all claimed). ADVANTAGE - The method provides economical and easy manufacture of a graphene wafer and a graphene device with high electron mobility. DETAILED DESCRIPTION - INDEPENDENT CLAIMS are included for: (1) manufacturing a graphene wafer, comprising (a), optionally patterning the graphene layer, (b), (c) as above per se, (d) bonding, by intermolecular force, the released graphene layer onto a surface of a second substrate separate from the first substrate or onto a surface of a bonding layer formed on the surface of the second substrate, and (e) removing the metal layer; (2) a graphene wafer comprising a single layer structure of graphene or a multilayer structure of graphene bonded to a first substrate, where the single layer structure of graphene and the multilayer structure of graphene are released from a second substrate different from the first substrate; and (3) manufacturing a graphene device, comprising (a)-(e) as above per se, patterning the graphene layer and forming an electrode on a surface of the patterned graphene layer. DESCRIPTION OF DRAWING(S) - The figure shows a cross-sectional view of the graphene wafer. Silicon carbide substrate (101) Epitaxial graphene layer (111) Adhesive metal layer (120) Support body bonding layer (122) Support body. (124)