• 专利标题:   Graphene composition structure sensor for measuring pressure, has graphene layer that is transferred and covered on fusion optical waveguide layer and polydimethylsiloxane layer aligned and placed on graphene layer in pressure sensing area.
  • 专利号:   CN113405704-A
  • 发明人:   LI Y, YANG F, LIANG S, ZHAO M, XIAO Y
  • 专利权人:   UNIV CHINA MINING TECHNOLOGY BEIJING
  • 国际专利分类:   G01L001/24
  • 专利详细信息:   CN113405704-A 17 Sep 2021 G01L-001/24 202182 Pages: 8 Chinese
  • 申请详细信息:   CN113405704-A CN10706788 24 Jun 2021
  • 优先权号:   CN10706788

▎ 摘  要

NOVELTY - The sensor has a fusion optical waveguide layer (3) provided with a Y-branch type input beam splitter, an interference arm, a reference arm and a Y-branch type output combiner. The input beam splitter and the output combiner are located on a central line of the fusion optical waveguide layer. The interference arm and the reference arm are symmetrical along the central line. The interference arm of the fusion optical waveguide layer is provided with a pressure sensing area (8). The graphene layer is transferred and covered on fusion optical waveguide layer. A polydimethylsiloxane (PDMS) layer (1) is aligned and placed on a graphene layer (2) in pressure sensing area. USE - The graphene composition structure sensor is useful for measuring pressure. ADVANTAGE - The graphene composition structure sensor has good electromagnetic interference resistance, good environment applicability, high sensitivity, fast response time and improves the Mach-Zehnder type pressure sensor efficient pressure measuring range is small. DESCRIPTION OF DRAWING(S) - The drawing shows a schematic representation of the graphene composition structure sensor for measuring pressure. PDMS layer (1) Graphene layer (2) Fusion optical waveguide layer (3) Pressure sensing area (8)