• 专利标题:   Method for forming graphene pattern using exfoliation technique, involves selectively peeling graphene layer by polymer stamp, and forming raised pattern on rotator polymer stamp, where polymer stamp is made of polydimethylsiloxane.
  • 专利号:   WO2012157894-A2, KR2012127069-A, KR1218580-B1, WO2012157894-A3, EP2709141-A2, CN103703543-A, JP2014519198-W, US2015132488-A1, CN103703543-B, EP2709141-A4, EP2709141-B1
  • 发明人:   AN K, CHUNG T, JUNG D, KIM C G, KIM H S, LEE S S, LEE Y K, AN K S, CHUNG T M, LEE S, LI Y, KIM C, KIM H
  • 专利权人:   KOREA RES INST CHEM TECHNOLOGY, KOREA RES INST CHEM TECHNOLOGY, KOREA RES INST CHEM TECHNOLOGY
  • 国际专利分类:   H01L000/00, H01L021/027, C01B031/02, H05K003/02, B32B043/00, C23C016/26, C23C016/56
  • 专利详细信息:   WO2012157894-A2 22 Nov 2012 H01L-000/00 201280 Pages: 25
  • 申请详细信息:   WO2012157894-A2 WOKR003687 10 May 2012
  • 优先权号:   KR045302, WOKR003687

▎ 摘  要

NOVELTY - The method involves forming a graphene layer (104a) on a substrate (102). A graphene peeling layer (108) is formed on a pattern surface of the substrate by spin coating process. The graphene layer is selectively peeled by a rotator polymer stamp (106). A raised pattern is formed on the polymer stamp. The polymer stamp is made of polydimethylsiloxane (PDMS). The graphene peeling layer is made of organic solvent such as dimethyl sulfoxide or tetrahydrofuran. The graphene peeling layer is extended on a surface of the raised pattern based on rotation of the polymer stamp. USE - Method for forming a graphene pattern using exfoliation technique. ADVANTAGE - The method enables evenly forming width of the graphene layer. DETAILED DESCRIPTION - An INDEPENDENT CLAIM is also included for a graphene pattern forming device. DESCRIPTION OF DRAWING(S) - The drawing shows a cross sectional view of a substrate. Substrate (102) Graphene layer (104a) Polymer stamp (106) Graphene peeling layer (108)