• 专利标题:   Distribute feedback type silicon base mixed laser graphene manufacturing method, involves carrying SOI piece manufacturing process according to graphite rare light selective process, and fixing metal surface with buried ridge structure.
  • 专利号:   CN104319630-A
  • 发明人:   KAN Q, PAN J, WANG X, YUAN L, REN Z
  • 专利权人:   INST SEMICONDUCTORS CHINESE ACAD SCI
  • 国际专利分类:   H01S005/028, H01S005/22
  • 专利详细信息:   CN104319630-A 28 Jan 2015 H01S-005/22 201522 Pages: 10 Chinese
  • 申请详细信息:   CN104319630-A CN10593915 29 Oct 2014
  • 优先权号:   CN10593915

▎ 摘  要

NOVELTY - The method involves forming a SOI top layer with a silicon waveguide part (S1). A SOI piece manufacturing process is carried out according to graphite rare light selective process (S2). An evaporating layer is formed with a metal surface. Metal peeling is monitored by the silicon waveguide part. A metal containing area is formed with a metal bonding area (S3). A substrate is fixed on a lower separating limit layer that is formed with an active area (S4). Metal organic chemical gas is deposited on a contact layer (S5). The metal surface is fixed with a buried ridge structure (S6). USE - Distribute feedback type silicon base mixed laser graphene manufacturing method. ADVANTAGE - The method enables providing simple process, low scattering loss and better laser effect. DESCRIPTION OF DRAWING(S) - The drawing shows a flow diagram illustrating a distribute feedback type silicon base mixed laser graphene manufacturing method.'(Drawing includes non-English language text)' Step for forming a SOI top layer with a silicon waveguide part (S1) Step for carrying SOI piece manufacturing process according to graphite rare light selective process (S2) Step for forming an evaporating layer with a metal surface (S3) Step for fixing a substrate on a lower separating limit layer that is formed with an active area (S4) Step for depositing a metal organic chemical gas contact layer (S5) Step for fixing a metal surface with a buried ridge structure (S6)