• 专利标题:   Method for producing terahertz radiation detector, involves arranging contact pads on substrate, and coating graphene with contact pads, where contact pads are made in form of flat helical antenna logarithmic type contact pad.
  • 专利号:   RU2015135749-A
  • 发明人:   FEDOROV G E, GAYDUCHENKO I A, OBRAZTSOVA E D, RYBIN M G
  • 专利权人:   UNIV MOSC PEDAGOGICAL STATE
  • 国际专利分类:   H01L031/00
  • 专利详细信息:   RU2015135749-A 03 Mar 2017 H01L-031/00 201768 Pages: 1 Russian
  • 申请详细信息:   RU2015135749-A RU135749 25 Aug 2015
  • 优先权号:   RU135749

▎ 摘  要

NOVELTY - The method involves arranging contact pads on a substrate. Graphene is coated with the contact pads, where the contact pads are made in form of a flat helical antenna logarithmic type contact pad. The pads are made of metals with different work functions in lithographic cycle. The graphene is synthesized by chemical vapor deposition on the substrate of up to 1.2 centimeter-square. The substrate is used as material transparent in an operating wavelength detector. Silicon with conductivity of 10 ohm-cm is covered with thermal oxide of thickness 500 nm as the substrate. USE - Method for producing a terahertz radiation detector.