▎ 摘 要
NOVELTY - The method involves forming the graphene and the nitrogen is doped (S110) in the graphene. A micro-heater which is installed at the substrate is coated (S120) with the graphene. The carbon is filled with the dopant such as graphite, catalyst, and nitrogen. The mixing gas is injected into a chamber. The discharge is caused within the chamber and the carbon is evaporated. USE - Gas sensor manufacturing method. ADVANTAGE - The nitrogen dioxide is manufactured through the gas sensor and the nitrogen is doped in the micro heater is coated with graphene does not react with ammonia. DESCRIPTION OF DRAWING(S) - The drawing shows a flowchart illustrating gas sensor manufacturing method. (Drawing includes non-English language text) Step for doping nitrogen (S110) Step for coating substrate (S120)