• 专利标题:   Preparation of silicon-based germanium-doped graphene composite material used in e.g. solar cells, by placing silicon substrate/graphene in growth chamber, placing silicon buffer layer, depositing germanium and annealing.
  • 专利号:   CN107604336-A
  • 发明人:   YANG Y, ZHANG J, QIU F, WANG C, TONG L
  • 专利权人:   UNIV YUNNAN
  • 国际专利分类:   C23C014/16, C23C014/46, C23C014/58
  • 专利详细信息:   CN107604336-A 19 Jan 2018 C23C-014/46 201810 Pages: 5 Chinese
  • 申请详细信息:   CN107604336-A CN10810511 11 Sep 2017
  • 优先权号:   CN10810511

▎ 摘  要

NOVELTY - Preparation of silicon-based germanium-doped graphene composite material involves placing silicon substrate/graphene in growth chamber, placing silicon buffer layer having thickness of 30-50 nm between silicon substrate and graphene, depositing germanium at 200-800 degrees C and annealing for 0-30 minutes. USE - Preparation of silicon-based germanium-doped graphene composite material used in microelectronic devices, solar cells and infrared detection applications. ADVANTAGE - The method enables simple preparation of silicon-based germanium-doped graphene composite material with high carrier concentration and mobility.