• 专利标题:   Method of growing graphene for use in e.g. biomedical applications, involves introducing reaction gas containing oxygen-containing carbon source into furnace, heating, UV-irradiating reaction gas and depositing graphene film on substrate.
  • 专利号:   US2017144888-A1, CN106756881-A, TW571437-B1
  • 发明人:   CHIU J, YEH C, CHIU P, QIU B, QIU R, YE Z
  • 专利权人:   GFORCE NANO TECHNOLOGY LTD, JULI NANO TECHNOLOGY CO LTD
  • 国际专利分类:   C01B031/04, C23C016/455, C23C016/513, C01B032/186, C23C016/26, C23C016/44, C23C016/52, C23C016/48
  • 专利详细信息:   US2017144888-A1 25 May 2017 C01B-031/04 201760 Pages: 7 English
  • 申请详细信息:   US2017144888-A1 US072374 17 Mar 2016
  • 优先权号:   US258553P, US072374

▎ 摘  要

NOVELTY - Method of growing graphene by chemical vapor deposition involves loading at least one insulating substrate in a furnace, introducing a reaction gas containing an oxygen-containing carbon source into the furnace, heating the reaction gas and UV-irradiating the reaction gas with a UV source to decompose oxygen-containing carbon source and depositing a graphene film on a surface of the at least one insulating substrate. USE - Method for growing graphene used in biomedical applications,, electronic device and optoelectronic devices. ADVANTAGE - The method produces high crystallinity graphene layer. The decomposition of the carbon source at high temperature achieves nearly 100% monolayer coverage. The wet (acid) etching for a metal substrate and a polymer scaffold-aid transfer of the graphene film can be avoided.