• 专利标题:   Electroplating method for plating graphene oxide on photoresist surface, involves placing substrate material on anode of electroplating device, soaking substrate material in graphene oxide water solution, and plating substrate material.
  • 专利号:   CN114214690-A
  • 发明人:   XU C, MAO Z, GU D, MA X, LU H, CHEN P
  • 专利权人:   NINGBO NATA OPTO ELECTRONIC MATERIAL CO
  • 国际专利分类:   C25D005/54, C25D009/06
  • 专利详细信息:   CN114214690-A 22 Mar 2022 C25D-009/06 202233 Chinese
  • 申请详细信息:   CN114214690-A CN11610373 27 Dec 2021
  • 优先权号:   CN11610373

▎ 摘  要

NOVELTY - Electroplating graphene oxide on a photoresist surface comprises spin coating photoreist solution on a substrate material through spin coating method, baking and drying the spin-coated substrate material, placing the substrate material on an anode of an electroplating device, soaking the substrate materials in a graphene oxide aqueous solution, plating the substrate, and baking the electroplated substrate. USE - Electroplating method of graphene oxide on photoresist surface substrate material. ADVANTAGE - The method can improve the carbon content in the photoresist layer, so as to improve the etching resistance of the photo resist layer, and avoids the graphene oxide directly added in the mixing caused by the strong bonding force is not strong, unstable and so on. DETAILED DESCRIPTION - An INDEPENDENT CLAIM is included for the substrate material prepared by the electroplating method. DESCRIPTION OF DRAWING(S) - The drawing shows a flow chart of an electroplating method for plating graphene oxide on photoresist surface wherein it comprises the following steps. (Drawing includes non-English language text).