• 专利标题:   Pressure sensor, has lower electrode deposited on substrate material, graphene layer formed on lower electrode and made of graphene composite doped zinc oxide, and graphene doped zinc oxide layer formed on upper electrode.
  • 专利号:   CN106168515-A
  • 发明人:   YANG Y
  • 专利权人:   BAOFENG MODERN INT HOLDING CO LTD
  • 国际专利分类:   G01L001/16, G01L009/08
  • 专利详细信息:   CN106168515-A 30 Nov 2016 G01L-001/16 201702 Pages: 12 Chinese
  • 申请详细信息:   CN106168515-A CN10254404 18 May 2015
  • 优先权号:   CN10254404

▎ 摘  要

NOVELTY - The sensor has a lower electrode deposited on a substrate material. A graphene layer is formed on the lower electrode and made of graphene composite doped zinc oxide. A graphene doped zinc oxide layer is formed on an upper electrode, where thickness of the upper electrode is about 50-100nm, thickness of graphene-doped zinc oxide layer is about 50-120nm, thickness of the graphene layer is about 0.5-10nm and thickness of the lower electrode is about 30-80nm. USE - Pressure sensor. ADVANTAGE - The sensor ahs high intrinsic piezoelectric constant. DETAILED DESCRIPTION - An INDEPENDENT CLAIM is also included for a method for preparing a pressure sensor. DESCRIPTION OF DRAWING(S) - The drawing shows a sectional view of a pressure sensor.