• 专利标题:   Method for controlling graphene carrier of graphene quantum Hall device, involves carrying out carrier control to graphene layer through spacer layer and mixed layer, and providing graphene layer with graphene quantum Hall device.
  • 专利号:   CN112038215-A
  • 发明人:   WANG S, WANG X, LI J
  • 专利权人:   NAT INST METROLOGY CHINA
  • 国际专利分类:   H01L021/02, H01L043/06, H01L043/14
  • 专利详细信息:   CN112038215-A 04 Dec 2020 H01L-021/02 202004 Pages: 16 Chinese
  • 申请详细信息:   CN112038215-A CN10737582 28 Jul 2020
  • 优先权号:   CN10737582

▎ 摘  要

NOVELTY - The method involves providing (S10) a substrate. A graphene layer is formed on a surface of the substrate. A spacer layer is formed (S20) on the surface of the graphene layer away from the substrate. A mixed layer is formed (S30) on the surface of the spacer layer far away from the graphene layer. The mixed layer is provided with F4TCNQ and ZEP 520. The carrier control is carried out (S40) to the graphene layer through the spacer layer and the mixed layer. The graphene layer is provided with a graphene quantum Hall device. USE - Method for controlling graphene carrier of graphene quantum Hall device (claimed). ADVANTAGE - The method reduces charge density to improve conductivity and carrier mobility of the material, and has good stability and controllability. DESCRIPTION OF DRAWING(S) - The drawing shows a flow diagram of the process structure in the graphene carrier control method. Step for providing a substrate (S10) Step for forming spacer layer on the surface of the graphene layer away from the substrate (S20) Step for forming mixed layer on the surface of the spacer layer far away from the graphene layer (S30) Step for carrying out carrier control to the graphene layer through the spacer layer and the mixed layer (S40)