▎ 摘　　要

NOVELTY - The detector has an optical waveguide (2) formed on a substrate (1). Two ends of the optical waveguide are connected with a light input end (3) and a broadband light reflector (4). A surface of the optical waveguide is covered with a graphene nanometer belt (6). Two sides of the optical waveguide are connected to a first electrode (7) and a second electrode (8). An upper surface of the optical waveguide is covered with a metal particle array structure (9). The metal particle array structure comprises a two-dimensional hexagonal lattice structure, where distance between two adjacent hexagonal lattice units is about 50-500nm. USE - Metal array structure based graphene photodetector. ADVANTAGE - The detector has high response degree, and avoids low dark current and increases light-electrically large response bandwidth. DETAILED DESCRIPTION - An INDEPENDENT CLAIM is also included for a graphene structure based metal array photoelectric detector manufacturing method. DESCRIPTION OF DRAWING(S) - The drawing shows a side view of a metal array structure based graphene photodetector. Substrate (1) Optical waveguide (2) Light input end (3) Broadband light reflector (4) Graphene nanometer belt (6) Electrodes (7, 8) Metal particle array structure (9)