▎ 摘　　要

NOVELTY - The sensor has a silicon/silicon oxide substrate layer provided with a titanium electrode. A silicon/silicon dioxide substrate layer is etched on an upper surface of a cavity. The silicon/silicon dioxide substrate is bonded to an upper surface of the substrate. A lower surface of the substrate is connected to an upper surface of a tube seat. A lower end of the titanium electrode is connected with an external testing circuit. A shell covers the silicon/silicon dioxide substrate layer and graphene/boron nitride heterogeneous structure pressure-sensing layer. USE - Graphene or boron nitride heterogeneous structure pressure sensor. ADVANTAGE - The sensor has low manufacturing cost, better linearity, high rate of finished products, high sensitivity and better stability, and prolongs service life. DESCRIPTION OF DRAWING(S) - The drawing shows a front view of a graphene or boron nitride heterogeneous structure pressure sensor.