• 专利标题:   Method for transferring single crystal wafer graphene film to target substrate e.g. silicon sheet, involves removing heat release adhesive tape and each adhesive layer in composite layer after drying obtained heat release tape/auxiliary support layer/terpenoid small molecular layer.
  • 专利号:   CN114956062-A
  • 发明人:   LIU Z, XIE Q, CAI A, YAN R, WANG M, GAO X, LIN L, ZHENG L, HU Z, PENG H
  • 专利权人:   UNIV PEKING, BEIJING GRAPHENE INST
  • 国际专利分类:   C01B032/194
  • 专利详细信息:   CN114956062-A 30 Aug 2022 C01B-032/194 202283 Chinese
  • 申请详细信息:   CN114956062-A CN10213872 25 Feb 2021
  • 优先权号:   CN10213872

▎ 摘  要

NOVELTY - The method involves forming a terpenoid small molecular layer on a surface of a single crystal wafer graphene film directly grown on a growth substrate. An auxiliary support layer is formed on the terpenoid small molecular layer. A heat release adhesive tape is adhered on the auxiliary support layer. A bubbling stripping method is used to separate the growth substrate of the heat release tape/auxiliary support layer/terpenoid small molecular layer/single crystal wafer graphene film/growth substrate composite layer with the heat release adhesive tape/auxiliary support layer/terpenoid small molecular layer/single crystal wafer graphene thin film. The obtained heat release tape/auxiliary support layer/terpenoid small molecular layer/single crystal wafer graphene film composite layer is attached to the target substrate after drying. The heat release adhesive tape is heated and released for removing the auxiliary support layer/terpenoid small molecular layer composite layer. USE - Method for transferring a single crystal wafer graphene film to a target substrate such as silicon sheet or sapphire. ADVANTAGE - The method enables transferring the single crystal wafer graphene film to the target substrate such as silicon sheet or sapphire by dry method, which can avoid the water-oxygen doping between the wafers graphene and the target substrate, thus ensuring the mobility of the wafer germanium film after transferring is not reduced. The method enables realizing the weak interaction force between the terpenes small molecule and the single crystal graphene film, so that the terpene small molecule is easily dissolved in multiple kinds of organic solvent, thus easily removing the auxiliary support layer from the surface of the graphene film surface residue. The method ensures the cleanness of the bonding between the heat release adhesive tape and the heat-release adhesive layer. DESCRIPTION OF DRAWING(S) - The drawing shows a flow diagram illustrating a method for transferring a single crystal wafer graphene film to a target substrate. (Drawing includes non-English language text).