• 专利标题:   Fluorinated graphene foam preparation method involves taking graphene foam sample, putting sampling indoor deep reaction etching machine, pumping, putting into reaction cavity, and pumping using sulfur hexafluoride gas.
  • 专利号:   CN104925777-A
  • 发明人:   CHENG C, GUO H, LI W, LIU W, LIU X, LU W, MA L, MENG N, SHI T, WAN X, WANG F, WANG X, XU Y, ZHOU H
  • 专利权人:   UNIV ZHEJIANG
  • 国际专利分类:   C01B031/00
  • 专利详细信息:   CN104925777-A 23 Sep 2015 C01B-031/00 201613 Pages: 6 Chinese
  • 申请详细信息:   CN104925777-A CN10361794 26 Jun 2015
  • 优先权号:   CN10361794

▎ 摘  要

NOVELTY - A fluorinated graphene foam preparation method comprises taking graphene foam sample, putting sampling indoor deep reaction etching machine, pumping under 10-3 Torr, putting into reaction cavity, pumping under 10-6 Torr using sulfur hexafluoride gas at flow rate of 100 sccm, carrying out plasma excitation at ionization power of 25-300 W for 30 seconds to 20 minutes, and taking out. USE - Fluorinated graphene foam preparation method (claimed). ADVANTAGE - The method is simple, low-cost, has good controllability and suitable for industrialization.