▎ 摘 要
NOVELTY - The mirror has a layer (500) partially formed from graphene. The layer is arranged as a finishing layer on a layer arrangement. A substrate is made of material e.g. glass, quartz glass, glass ceramic and ceramic. An adhesive layer is arranged between the graphene layer and the layer arrangement, where the layer arrangement comprises a layer subsystem. The graphene-containing layer is provided on a copper foil (501) by a chemical vapor deposition (CVD) method. The graphene-containing layer is arranged on a carrier film. USE - Mirror i.e. facet mirror, for use in a lighting system (all claimed) for a projection exposure system. ADVANTAGE - The layer is partially formed from graphene and arranged as the finishing layer on the layer arrangement, and the substrate is made of material e.g. glass, quartz glass, glass ceramic and ceramic, thus producing mirror coating systems with smooth surfaces and/or boundary faces, avoiding divergence losses and ensuring the mirror with high reflectivity and low roughness, and hence manufacturing the mirror in a simple and efficient manner. DETAILED DESCRIPTION - An INDEPENDENT CLAIM is also included for a method for manufacturing a mirror. DESCRIPTION OF DRAWING(S) - The drawing shows a schematic view of a graphene layer.'(Drawing includes non-English language text)' Copper substrate (110) Layer (500) Copper foil (501)