• 专利标题:   Mirror i.e. facet mirror, for use in lighting system for projection exposure system, has layer partially formed from graphene and arranged as finishing layer on layer arrangement, and substrate made of material e.g. glass and ceramic.
  • 专利号:   DE102012204833-A1
  • 发明人:   FREIMANN R, RUNDE D, VON BLANCKENHAGEN G
  • 专利权人:   ZEISS SMT GMBH CARL
  • 国际专利分类:   G02B001/10, G02B005/08, G02B005/09, G02B005/10, G03F007/20, G21K001/06
  • 专利详细信息:   DE102012204833-A1 28 Feb 2013 G02B-005/08 201319 Pages: 30 German
  • 申请详细信息:   DE102012204833-A1 DE10204833 27 Mar 2012
  • 优先权号:   DE10204833

▎ 摘  要

NOVELTY - The mirror has a layer (500) partially formed from graphene. The layer is arranged as a finishing layer on a layer arrangement. A substrate is made of material e.g. glass, quartz glass, glass ceramic and ceramic. An adhesive layer is arranged between the graphene layer and the layer arrangement, where the layer arrangement comprises a layer subsystem. The graphene-containing layer is provided on a copper foil (501) by a chemical vapor deposition (CVD) method. The graphene-containing layer is arranged on a carrier film. USE - Mirror i.e. facet mirror, for use in a lighting system (all claimed) for a projection exposure system. ADVANTAGE - The layer is partially formed from graphene and arranged as the finishing layer on the layer arrangement, and the substrate is made of material e.g. glass, quartz glass, glass ceramic and ceramic, thus producing mirror coating systems with smooth surfaces and/or boundary faces, avoiding divergence losses and ensuring the mirror with high reflectivity and low roughness, and hence manufacturing the mirror in a simple and efficient manner. DETAILED DESCRIPTION - An INDEPENDENT CLAIM is also included for a method for manufacturing a mirror. DESCRIPTION OF DRAWING(S) - The drawing shows a schematic view of a graphene layer.'(Drawing includes non-English language text)' Copper substrate (110) Layer (500) Copper foil (501)