• 专利标题:   Manufacture of graphene-based device used for e.g. gas sensor, involves providing graphene assembly, transferring graphene assembly to substrate, using photolithography and removing UV barrier layer and photoresist layer.
  • 专利号:   GB2574412-A, WO2019234410-A1, TW202004924-A
  • 发明人:   MIGLIORATO M, KUMAR R, MONTEVERDE U
  • 专利权人:   UNIV MANCHESTER
  • 国际专利分类:   G01N027/12, H01L021/02, B82Y030/00, C01B032/186, C30B025/22, G01N027/414, H01L021/20, H01L029/16, G01N027/26, H01L021/365, H01L021/461
  • 专利详细信息:   GB2574412-A 11 Dec 2019 H01L-021/02 201998 Pages: 43 English
  • 申请详细信息:   GB2574412-A GB009160 05 Jun 2018
  • 优先权号:   GB009160

▎ 摘  要

NOVELTY - Manufacture of graphene-based device (33) involves providing a graphene assembly comprising one or more layers of graphene, photoresist layer (P1) arranged on the one or more layers of graphene, and UV barrier layer arranged on the photoresist layer (P1) on opposite side to the one or more layers of graphene, transferring the graphene assembly onto a substrate (44) comprising at least one cavity so that the one or more layers of graphene traverse the at least one cavity, using photolithography to expose portions of the one or more layers of graphene on opposite sides of the at least one cavity, forming conductive contacts over the exposed portions of graphene, and removing the UV barrier layer and photoresist layer (P1). USE - Manufacture of graphene-based device used for gas sensor (all claimed) for biosensors and/or chemical sensors applications. ADVANTAGE - The method produces graphene-based device comprising UV barrier layer having excellent UV shielding effect to protect the underlying layer of graphene from UV radiation during fabrication. The SU8 polymer has high stability and is flexible and compatible with aqueous solutions. DETAILED DESCRIPTION - An INDEPENDENT CLAIM is included for graphene-based device. DESCRIPTION OF DRAWING(S) - The drawing shows a schematic cross-sectional view of the device. Device (33) Substrate material (43a,43b) Substrate (44) Cavities (44a) Conductive material (56)