• 专利标题:   Sensing device has second electrode layer that is provided with opening, and graphene layer that is provided to contact with second electrode layer and amorphous silicon layer.
  • 专利号:   CN104183655-A, US9190446-B1, TW201601301-A, CN104183655-B, TW573257-B1
  • 发明人:   CHEN Z, LIN Q, CHEN T, LIN C, CHEN T H, LIN C MOPTRONICS CORP
  • 专利权人:   AU OPTRONICS CORP
  • 国际专利分类:   H01L031/02, H01L031/08, H01L027/146, H01L029/786, H01L031/0224, H01L031/028, H01L031/0376, H01L031/105
  • 专利详细信息:   CN104183655-A 03 Dec 2014 H01L-031/02 201510 Pages: 24 Chinese
  • 申请详细信息:   CN104183655-A CN10436621 29 Aug 2014
  • 优先权号:   TW122336

▎ 摘  要

NOVELTY - The sensing device (10) has multiple sensing pixels that are arranged in an array. Each sensing pixel includes active element (TFT), sensing element (SE) and driving element (RFT). Driving element is electrically connected between active element and sensing element. The sensing element includes first electrode layer (102) and amorphous silicon layer (AS) which are positioned in first electrode layer and second electrode layer (104) which are positioned in amorphous silicon layer. A graphene layer (106) is provided to contact with second electrode layer and amorphous silicon layer. USE - Sensing device. ADVANTAGE - The sensing device is effectively manufactured by reducing the number of photolithographic etching process. The process complexity and processing time are reduced. The sensing device is easily manufactured. Te mass production of the sensing device is achieved. The manufacturing cost of the sensing device is reduced. DESCRIPTION OF DRAWING(S) - The drawing shows a cross-sectional view illustrating the manufacturing method of the sensing device. Sensing device (10) First electrode layer (102) Second electrode layer (104) Graphene layer (106) Amorphous silicon layer (AS) Driving element (RFT) Sensing element (SE) Active element (TFT)