▎ 摘　　要

NOVELTY - The utility model claims a graphene electrode electrostatic lens and scanning electron microscope, graphene electrode electrostatic lens comprises a conductive substrate, at least one layer of graphene electrode layer, electrode wire and charged particle beam channel; the upper surface of the conductive substrate is provided with an insulating layer, the graphene electrode layer is set on the upper surface of the conductive substrate, the surface of the graphene electrode layer is covered with a boron nitride dielectric layer, the surface of the graphene electrode layer is formed with insulation; the electrode wire is set on the upper surface of the graphene electrode layer and the boron nitride dielectric layer covered on the surface of the graphene electrode layer, the pin of the electrode wire extends out of the boron nitride dielectric layer from the upper surface of the graphene electrode layer to the outside; the charged particle beam channel is located at the central position of the electrostatic lens, from up to down through the boron nitride dielectric layer, the graphene electrode layer and the conductive substrate. The graphene electrode electrostatic lens provided by the utility model can greatly reduce the volume and weight of the electrostatic lens under the condition of realizing the effect of focusing and accelerating the charged particle beam, at the same time, it is easy to ensure the high processing precision. DETAILED DESCRIPTION - An INDEPENDENT CLAIM is included for a scanning electron microscope.